Interfacial engineering of a Mo/Hf0.3Zr0.7O2/Si capacitor using the direct scavenging effect of a thin Ti layer

Se Hyun Kim1, Geun Taek Yu1, Geun Hyeong Park1

  • 1School of Materials Science and Engineering, Pusan National University, Busan 46241, Republic of Korea. jilee@pnu.ac.kr.

Chemical Communications (Cambridge, England)
|October 28, 2021
PubMed