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Updated: Oct 12, 2025

Scalable Quantum Integrated Circuits on Superconducting Two-Dimensional Electron Gas Platform
Published on: August 2, 2019
A Flexible Design Platform for Si/SiGe Exchange-Only Qubits with Low Disorder
Wonill Ha1, Sieu D Ha1, Maxwell D Choi1
1HRL Laboratories, LLC, 3011 Malibu Canyon Road, Malibu, California 90265, United States.
We developed a new silicon quantum dot platform for quantum computing, called SLEDGE, using CMOS-compatible processing. This technology demonstrates improved qubit performance and flexibility for scalable quantum information processing.
Area of Science:
- Quantum Information Science
- Semiconductor Quantum Devices
- Quantum Computing Hardware
Background:
- Spin-based silicon quantum dots offer promising qubit properties like long coherence times.
- Existing fabrication methods face challenges in scalability and design flexibility.
Purpose of the Study:
- To introduce a novel fabrication platform for silicon quantum dots.
- To demonstrate a versatile and scalable approach for creating qubit devices.
Main Methods:
- Developed the SLEDGE (Silicon LEad-edge Direct-write Gate dEvice) platform combining CMOS-like processing and direct-write lithography.
- Engineered dot-shaped gates patterned on a single plane, connected via vias to interconnects.
- Utilized rf qubit control and advanced lithographic techniques.
Main Results:
- Achieved reduced electrostatic disorder compared to traditional overlapping gate designs.
- Demonstrated spin coherent exchange oscillations in the fabricated qubits.
- Presented successful single-qubit blind randomized benchmarking data.
Conclusions:
- The SLEDGE platform offers a scalable and flexible approach for fabricating silicon quantum dot qubits.
- This technology shows potential for advancing quantum information processing with improved device performance and manufacturability.
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