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Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application
Fahu Xu1, Dayong Qiao1,2, Changfeng Xia3
1Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China.
Micromachines
|November 27, 2021
Summary
This study details a novel synchronization method for micro-electro-mechanical system (MEMS) mirror pairs, crucial for developing cost-effective MEMS-based LiDAR systems. The synchronized mirrors enable high-resolution 3D optical imaging with a wide field of view.
Area of Science:
- Optics and Photonics
- Micro-electro-mechanical Systems (MEMS)
- Robotics and Autonomous Systems
Background:
- Micro-electro-mechanical system (MEMS)-based Light Detection and Ranging (LiDAR) offers a low-cost, compact solution for 2D and 3D optical imaging.
- Previous work introduced a semi-coaxial MEMS LiDAR design utilizing a synchronous MEMS mirror pair.
Purpose of the Study:
- To reveal the detailed synchronization method for a comb-actuated MEMS mirror pair.
- To demonstrate simultaneous frequency sweeping and phase adjustment for accelerated MEMS mirror synchronization.
- To establish a functional MEMS LiDAR system based on the synchronized mirror pair.
Main Methods:
- Developed a synchronization technique for comb-actuated MEMS mirror pairs, focusing on frequency, amplitude, and phase.
- Implemented simultaneous frequency sweeping and phase adjustment to expedite the synchronization process.
- Constructed a one-beam MEMS LiDAR system incorporating the synchronized MEMS mirror pair.
Main Results:
- Achieved complete MEMS mirror synchronization within 5 seconds.
- The resulting MEMS LiDAR system demonstrated a 60° field of view (FOV).
- Obtained an angular resolution of 0.2° and a frame rate of 360 Hz.
Conclusions:
- The experimental results validate the feasibility and efficiency of the proposed MEMS mirror synchronization method.
- The developed MEMS LiDAR system exhibits promising potential for various optical imaging applications.
- This advancement contributes to the development of more accessible and high-performance LiDAR technologies.
