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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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A Semi-Automated System for Wafer-Scale Optical Waveguide Characterization.

Ramgopal Venkateswaran, Jay W Reddy, Maysamreza Chamanzar

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    |December 11, 2021
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    Summary

    We developed a semi-automated robotic system for high-throughput wafer-scale characterization of integrated photonic waveguides. This method uses outscattered light imaging to measure propagation loss, improving biomedical sensor development.

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    Area of Science:

    • Photonics
    • Biomedical Engineering
    • Robotics

    Background:

    • Integrated photonic waveguide systems are crucial for biomedical sensing.
    • Current characterization methods lack robustness and high throughput.
    • Efficient characterization is needed for wafer-scale production.

    Purpose of the Study:

    • To develop a semi-automated robotic system for wafer-scale characterization of integrated photonic waveguides.
    • To enable high-throughput measurement of propagation loss with minimal human intervention.
    • To optimize input coupling efficiency for improved waveguide characterization.

    Main Methods:

    • A semi-automated robotic system was designed for wafer-scale waveguide characterization.
    • Outscattered light imaging was used to measure waveguide propagation loss.
    • Closed-loop control was implemented for automated input coupling efficiency optimization.

    Main Results:

    • The system demonstrated high-throughput characterization of integrated photonic waveguides.
    • Automated optimization of input coupling efficiency was successfully achieved.
    • The method provides a foundation for fully automated wafer-scale photonic waveguide characterization.

    Conclusions:

    • The developed system enables robust, high-throughput characterization of integrated photonic waveguides.
    • This technology supports the development of advanced biomedical sensors.
    • It enhances the yield of optoelectrical neural probes for surgical implantation and electrophysiology.