Surface Reconstruction of Microscale Objects Based on Grid-Patterned Structured-Light Measurements.

Area of Science:

• Optics and Photonics
• Metrology
• Microscopy

Background:

• Accurate 3D surface reconstruction of microscale objects is crucial for various scientific and industrial applications.
• Existing methods often lack the precision or adaptability required for microscale metrology.

Purpose of the Study:

• To design and validate a structured-light projection system for precise 3D surface reconstruction of microscale objects.
• To investigate the reconstruction of metal surfaces using microscale structured-light patterns.

Main Methods:

• Development of a universal projector and microscope system with real-time pattern editing capabilities.
• Calibration of internal and external parameters for microscope vision and projection systems.
• Design of an image algorithm for grid-node detection in structured-light patterns.

Main Results:

• Successful 3D surface reconstruction of microscale objects with high fidelity to original surfaces.
• Achieved reconstruction precision of ±4.0 μm (X, Y) and ±7.5 μm (Z) with 95% confidence.
• Demonstrated consistency between reconstructed and original surfaces.

Conclusions:

• The developed system and method are effective for 3D shape measurement of microstructures in microscopic fields.
• The proposed approach offers improved adaptability and precision compared to current microscale measurement techniques.
• The system is suitable for a broader range of applications in microscale metrology.