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Laser Actuated Microgripper Using Optimized Chevron-Shaped Actuator.

Belal Ahmad¹, Hugo Chambon¹, Pierre Tissier¹

¹FEMTO-ST Institute, Université Bourgogne Franche-Comté, CNRS, 25000 Besançon, France.

|December 24, 2021

Summary

We developed a laser-actuated microgripper using a polymeric structure with gold coating for remote micromanipulation. This optothermally actuated device offers simple fabrication and fast response for lab-on-chip applications.

Keywords:

microgripper micromanipulation optothermal actuation

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Area of Science:

Microelectromechanical Systems (MEMS)
Optics and Photonics
Materials Science

Background:

Micromanipulation is crucial for various applications, including lab-on-chip devices.
Existing microgrippers often require complex actuation mechanisms or direct contact.
Remote actuation offers advantages in precision and contamination control.

Purpose of the Study:

To propose and characterize a novel laser-actuated microgripper.
To investigate the optothermal actuation mechanism for micromanipulation.
To demonstrate the potential of the microgripper in lab-on-chip applications.

Main Methods:

Design and modeling of an optothermally actuated polymeric chevron structure.
Coating the structure with optimized metallic layers (gold) for enhanced optical absorbance.
Fabrication using photolithography and metal deposition, followed by experimental characterization.

Main Results:

The microgripper achieved an opening of 40 µm and a response time of 60 ms.
A generated force in the order of hundreds of µN was recorded.
Successful pick-and-place experiments with 120 µm microbeads were demonstrated.

Conclusions:

The laser-actuated microgripper provides effective remote micromanipulation capabilities.
Simple fabrication and actuation make it suitable for mobile microrobots.
The device shows significant promise for integration into lab-on-chip systems.