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Highly Sensitive NO2 Detection by TVS-Grown Multilayer MoS2 Films
Kenjiro Hayashi1,2, Masako Kataoka1, Hideyuki Jippo1,2
1Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0197, Japan.
ACS Omega
|January 24, 2022
Summary
Polycrystalline molybdenum disulfide (MoS2) films with small grain sizes show unexpectedly high sensitivity to nitrogen dioxide (NO2) gas sensors. This finding suggests that grain boundaries and porous structures in MoS2 can enhance sensor performance, offering new avenues for device fabrication.
Area of Science:
- Materials Science
- Nanotechnology
- Chemical Engineering
Background:
- Two-dimensional layered materials like MoS2 are promising for sensors due to their large surface area and electrical properties.
- Grain boundaries in polycrystalline materials are often overlooked but can significantly impact device performance.
- Understanding grain boundary effects is crucial for optimizing sensors based on layered materials.
Purpose of the Study:
- To investigate the influence of grain size and grain boundaries on the NO2 sensing properties of MoS2 films.
- To compare MoS2 films grown by chemical vapor deposition (CVD) and thermal vapor sulfurization (TVS) for sensor applications.
- To elucidate the mechanisms behind enhanced NO2 adsorption and sensing in polycrystalline MoS2.
Main Methods:
- Growth of MoS2 films with varying grain sizes using CVD and TVS methods.
- Fabrication of transistor-based gas sensors using the synthesized MoS2 films.
- Evaluation of NO2 sensing performance, including sensitivity and adsorption behavior (Langmuir isotherm).
- Characterization using transmission electron microscopy (TEM) and theoretical calculations.
Main Results:
- CVD-grown MoS2 films exhibited superior electrical properties due to larger grain sizes.
- TVS-grown MoS2 films, with smaller grain sizes and mirror twin grain boundaries, showed unexpectedly higher NO2 sensitivity.
- NO2 adsorption on modeled grain boundaries was comparable to the ideal basal plane.
- Porous structures in TVS-grown films may also contribute to enhanced sensing.
Conclusions:
- Highly sensitive MoS2 gas sensors can be fabricated using polycrystalline films with small grain sizes.
- Grain boundaries and porous structures play a significant role in enhancing NO2 sensing.
- This research opens possibilities for optimizing sensors based on other two-dimensional materials by controlling grain characteristics.

