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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Martin Lee1, Martin P Robin2, Ruben H Guis2
1Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands.
Free-standing complex oxides act as self-sealing membranes for pressure sensors, significantly improving gas barrier properties after annealing. This eliminates the need for additional sealing steps in 2D material-based sensors.
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