Optoelectronic Angular Displacement Measurement Technology for 2-Dimensional Mirror Galvanometer
Shao-Kang Hung1, Yu-Hsin Chung1, Cheng-Lung Chen1
1Department of Mechanical Engineering, National Yang Ming Chiao Tung University, No. 1001, University Road, Hsinchu 30010, Taiwan.
Abstract:
The mirror galvanometer is a crucial component of laser cutters/engravers. Novel two-dimensional mirror galvanometers demonstrate less trajectory distortion than traditional one-dimensional ones. This article proposes an optoelectronic sensor that measures a mirror's inclinations in two dimensions simultaneously. The measuring range, resolution, and sampling rate are ±10°, 0.0265°, and 2 kHz, respectively. With the proposed sensor, a closed-loop control can be further implemented to achieve precision laser machining. Its compact size and low cost meet the requirements of miniature laser engravers, which have become popular in recent years.
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