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Area of Science:

  • Multiphysics simulation
  • Microelectromechanical systems (MEMS) engineering
  • Nonlinear dynamics

Background:

  • MEMS electrostatic comb resonators face reliability and stability challenges.
  • Existing coupled-field simulations lack accuracy due to limited consideration of nonlinear dynamics.
  • Accurate simulation is crucial for MEMS device design and application.

Purpose of the Study:

  • To propose a novel electrostatic-fluid-structure three-field indirect coupling method for MEMS resonators.
  • To enhance the accuracy of multiphysics simulations for MEMS devices.
  • To investigate the nonlinear dynamic behavior of microcomb resonant electric field sensors.

Main Methods:

  • Developed a 3D finite element simulation model for electrostatic-fluid-structure multiphysics coupling.
  • Employed an indirect coupling approach to manage computational complexity.
  • Incorporated nonlinear damping and microscale effects in the simulation using COMSOL software.

Main Results:

  • Calculated and analyzed multiorder eigenmodes, resonant frequency, vibration amplitude, and fluid load distribution.
  • Observed high fluid load in the middle and low on the sides of the microresonator along the thickness.
  • Viscous damping at atmospheric pressure is dominated by incompressible flow damping in comb teeth.

Conclusions:

  • The indirect coupling method accurately predicts MEMS resonator performance, with amplitude and resonance frequency errors of 15.47% and 12.48% respectively, compared to experimental data.
  • Nonlinear damping forces and residual thermal stress significantly influence MEMS resonator dynamics.
  • This research provides a valuable reference for the dynamic characteristic studies of electrostatically driven MEMS devices.