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Variable ring-shaped lithography for the fabrication of meso- and microscale binary optical elements.

Maria Knoblich, Matthias Kraus, Daniela Stumpf

    Applied Optics
    |March 17, 2022
    PubMed
    Summary
    This summary is machine-generated.

    A new lithographic tool fabricates rotationally symmetric optical structures using a variable ring-shaped light. This method offers faster exposure and avoids stitching errors compared to traditional techniques.

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    Area of Science:

    • Optics and Photonics
    • Nanofabrication
    • Optical Engineering

    Background:

    • Conventional lithography struggles with fabricating rotationally symmetric optical structures efficiently.
    • Direct writing in Cartesian coordinates leads to suboptimal results and stitching artifacts for these structures.

    Purpose of the Study:

    • To present the concept, optical design, and implementation of a novel lithographic exposure tool.
    • To enable the fast fabrication of rotationally symmetric meso- and microscale optical structures.
    • To overcome limitations of conventional lithographic methods for specific optical designs.

    Main Methods:

    • Development of a lithographic exposure tool utilizing a variable ring-shaped light distribution.
    • Ring diameter adjustment from 1.6 to 6.5 mm with a constant ring width of ~75 µm (FWHM).
    • Demonstration of fabrication capabilities using various meso- and microscale optical structures.

    Main Results:

    • Successful implementation of a novel lithographic exposure tool.
    • Fabrication of diffractive axicon elements, phase rings, Fresnel zone plates, and zone plate arrays.
    • Demonstrated advantages in speed and precision for rotationally symmetric structures.

    Conclusions:

    • The novel lithographic tool is effective for fabricating rotationally symmetric optical structures.
    • The variable ring-shaped light distribution offers a significant improvement over Cartesian coordinate lithography.
    • This technology enables efficient production of advanced optical components at meso- and microscale.