Resonant-cavity-enhanced p-i-n photodetector using a high-contrast-grating for 940nm

Two novel top mirror designs of high contrast gratings (HCG) are used as the top mirrors of the resonant-cavity enhanced photodetector (RCE PD) operating at 940 nm. The bottom mirror is composed of 36-pair AlAs/GaAs, while the top mirror is a thin-layer grating providing reflectivity higher than 99%. With grating periods varying from 450 to 490 nm, different designs with FWHM of about 0.2∼3 nm are attained. A broadband HCG as top reflector can result in significantly improved manufacturing cost, as well as near unity quantum efficiency (QE). A resonator HCG can result in a new splitting responsivity spectrum with on-off ratio of 14 dB, which has the potential to serve as the basic elements of ternary system, polarization dichroism or diattenuation, and optical switch.