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Updated: Sep 28, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
I-Huan Chiu1, Shin'ichiro Takeda2, Meito Kajino3
1Radioisotope Research Center, Institute for Radiation Sciences, Osaka University, 1-1, Machikaneyama, Toyonaka, Osaka, 560-0043, Japan. ichiu.irs@osaka-u.ac.jp.
This study introduces a non-destructive 3D elemental analysis technique using muonic X-rays and advanced imaging detectors. The method successfully maps elemental distribution in bulk materials, proving its feasibility for sensitive samples.
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