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Novel Step Floating Islands VDMOS with Low Specific on-Resistance by TCAD Simulation

Dongyan Zhao1, Yubo Wang1, Yanning Chen1,2

  • 1Beijing Engineering Research Center of High-Reliability IC with Power Industrial Grade, Beijing Smart-Chip Microelectronics Technology Co., Ltd., Beijing 102299, China.

Micromachines
|April 23, 2022
PubMed

Keywords:
VDMOSbreakdown voltageelectric fieldspecific on-resistance

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