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    Area of Science:

    • Optics
    • Metrology
    • Instrumentation

    Background:

    • Accurate measurement of relative displacements is crucial in various scientific and industrial applications.
    • Existing methods may lack the multi-axis capability or precision required for complex surface analysis.

    Purpose of the Study:

    • To design and demonstrate a multi-axis optical probe for independent measurement of external surface relative displacements.
    • To achieve high-resolution displacement sensing using modulated optical cavities.

    Main Methods:

    • Utilizing Fabry-Perot interferometers to form optical cavities with external surfaces.
    • Employing mechanical modulation of optical cavities and frequency separation for multiple sensing axes.
    • Fabricating and testing two probe prototypes: one with shuttering and another with dichroic mirrors and dual wavelengths.

    Main Results:

    • Demonstrated independent measurement of mirror displacements between 1 to 2 µm.
    • Achieved displacement noise below 10-nm rms for moving surfaces, compared to a 2.8 nm noise floor for stationary mirrors.
    • Established operational bandwidth within the 200 Hz to 2.43 kHz modulation frequency range.

    Conclusions:

    • The developed multi-axis optical probe enables precise, independent measurement of relative surface displacements.
    • The system shows promise for applications requiring high-resolution metrology of external surfaces.
    • Further development could enhance bandwidth and reduce noise for broader applicability.