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Electron-beam induced damage process for Ca2Na2Nb5O16nanosheets
Haneul Choi1,2, Gwangyeob Lee1, Jong Wook Roh3
1Advanced Analysis and Data Center, Korea Institute of Science and Technology, Seoul, Republic of Korea.
Nanotechnology
|April 29, 2022
Summary
Electron beam damage in dielectric 2D oxide nanosheets like Ca2Na2Nb5O16(CNNO) was studied. Understanding these mechanisms enables high-resolution atomic imaging for material characterization.
Area of Science:
- Materials Science
- Nanotechnology
- Solid State Chemistry
Background:
- Dielectric two-dimensional (2D) oxide nanosheets offer thermal stability and high-k properties, crucial for electronic applications.
- Characterizing the atomic structure of these materials is challenging due to their susceptibility to electron-beam degradation during analysis.
- Exfoliated Ca2Na2Nb5O16 (CNNO) nanosheets represent a class of materials with potential but limited structural understanding.
Purpose of the Study:
- To investigate the distinct electron-beam induced damage mechanisms in exfoliated CNNO nanosheets.
- To elucidate the roles of knock-on damage and radiolysis in structural degradation at varying electron beam energies.
- To establish optimal conditions for atomic-scale imaging of sensitive 2D oxide materials.
Main Methods:
- Utilized Cs-corrected scanning transmission electron microscopy (STEM) to analyze CNNO nanosheets.
- Investigated damage mechanisms at different accelerating voltages (high and low) to differentiate between knock-on and radiolysis effects.
- Employed a decreased beam current during imaging to minimize electron beam-induced damage.
Main Results:
- At high voltages, knock-on damage dominated, leading to short-range order and an amorphous structure.
- At low voltages, radiolysis, facilitated by dangling bonds in solution-processed CNNO, caused significant elemental loss and complete structural disorder.
- Radiolysis damage kinetics were faster and induced more extensive elemental loss than knock-on damage.
- Successful atomic-scale imaging of CNNO nanosheets was achieved at 300 keV with reduced beam current.
Conclusions:
- Electron beam damage in 2D oxide nanosheets occurs via distinct knock-on and radiolysis pathways, dependent on accelerating voltage.
- Radiolysis is a significant degradation pathway for insulating 2D oxides with dangling bonds, proceeding faster than knock-on damage.
- Understanding these damage mechanisms is critical for achieving high-resolution atomic imaging and accurate characterization of 2D materials using electron microscopy.

