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Updated: Sep 23, 2025

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Deep sub-angstrom resolution imaging by electron ptychography with misorientation correction
Haozhi Sha1,2,3,4, Jizhe Cui1,2,3,4, Rong Yu1,2,3,4
1National Center for Electron Microscopy in Beijing, Tsinghua University, Beijing 100084, China.
Abstract:
Superresolution imaging of solids is essential to explore local symmetry breaking and derived material properties. Electron ptychography is one of the most promising schemes to realize superresolution imaging beyond aberration correction. However, to reach both deep sub-angstrom resolution imaging and accurate measurement of atomic structures, it is still required for the electron beam to be nearly parallel to the zone axis of crystals. Here, we report an efficient and robust method to correct the specimen misorientation in electron ptychography, giving deep sub-angstrom resolution for specimens with large misorientations. The method largely reduces the experimental difficulties of electron ptychography and paves the way for widespread applications of ptychographic deep sub-angstrom resolution imaging.
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