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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Advances in Digital Holographic Interferometry

Viktor Petrov1, Anastsiya Pogoda2, Vladimir Sementin2

  • 1Faculty of Photonics, National Research University ITMO, 197101 St. Petersburg, Russia.

Journal of Imaging
|July 25, 2022
PubMed

Keywords:
digital holographyholographic interferometryrestoring algorithmsspatial resolution

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