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Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications.
Inga Morkvenaite-Vilkonciene1,2, Vytautas Bucinskas1, Jurga Subaciute-Zemaitiene1
1Department of Mechatronics, Robotics and Digital Manufacturing, Vilnius Gediminas Technical University, 10257 Vilnius, Lithuania.
Micromachines
|August 26, 2022
Summary
This paper classifies electrostatic microactuators, addressing the challenge of selecting suitable methods for micropositioning applications. It overviews recent advancements and diverse implementations in the field.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Actuator Technology
- Precision Engineering
Background:
- Electrostatic microactuators are widely used in micropositioning due to their versatility.
- The variety of designs and operation modes presents challenges in selecting appropriate methods.
Purpose of the Study:
- To classify electrostatic actuators and establish a systematic overview of existing devices.
- To aid researchers and engineers in choosing suitable electrostatic actuator technologies.
Main Methods:
- Comprehensive literature review of electrostatic actuators developed in the last 5 years.
- Classification based on design principles, operational modes, and applications.
- Modeling of different actuator designs.
Main Results:
- A structured classification system for electrostatic actuators.
- Overview of recent advancements in electrostatic microactuator technology.
- Examples of diverse implementations and applications.
Conclusions:
- The classification provides a valuable framework for understanding and selecting electrostatic microactuators.
- Highlights the rapid development and broad applicability of electrostatic actuation in micropositioning.
