Electromechanical Impedance Response in CMUT-Based Gas Sensors Exposed to Volatile Organic Compounds

A capacitive micromachined ultrasonic transducer (CMUT) was engineered and functionalized with either zeolitic imidazolate framework-8 (ZIF-8) dispersed in an AZ1512HS photoresist matrix or with graphene oxide (GOx) to operate as a gravimetric sensor for organic vapors. The sensor response was investigated under controlled humidity conditions during pulsed exposure to acetone, ethyl methyl ketone, isopropanol, kerosene, and diesel vapors. The impedance of the device was monitored by observing and tracking the resonance frequency shift as well as the resistance maximum shift, giving us the possibility to track two response parameters simultaneously. Different combinations of shifts in the sensor resonance frequency and the resistance maximum values were observed for the ZIF-8 functionalized device when exposed to the selected vapors, ranging from 12.4 kHz for ethyl methyl ketone to 2.4 kHz for diesel, and from 580 Ω for acetone to 20 Ω for isopropanol. Sensors functionalized with GOx did not demonstrate any significant response to either ethyl methyl ketone or isopropanol in the frequency domain. GOx-functionalized sensors were used for relative humidity monitoring in test gases. Besides the conventional response of the produced gravimetric sensing system, we also observed a strong relationship between the humidity of the gas mixture and the strength of the interaction of target gases with the functional film of the sensor. The results highlight the multidimensional nature of the sensor response and demonstrate how humidity influences the interaction between vapor molecules and the functional coating. This paper focuses on the characterization of the coupled behavior of resonance frequency and resistance shifts under controlled operating conditions. The presented experimental setup provides a basis for future concentration-dependent investigations and functional material comparisons in CMUT-based gravimetric sensing systems and provides a necessary foundation for accurate interpretation of future concentration-resolved measurements.