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Updated: Aug 29, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Liquid-Phase-Assisted Catalytic Nitridation of Silicon and In Situ Growth of α-Si3N4
Zhenglong Liu1, Zhinan Chai1,2, Chao Yu1
1The State Key Laboratory of Refractories and Metallurgy, Wuhan University of Science and Technology, Wuhan 430081, China.
Abstract:
Si3N4 powders were synthesized with Fe, Co, or Ni as catalysts using Si powder at 1250 °C in a nitrogen atmosphere by liquid-phase-assisted catalytic nitridation synthesis (LPA-CNS). The catalytic effects of the metals on the nitridation of silicon powder were investigated by mixing the powder with 2 wt% by mass of Fe, Co, or Ni in a high-temperature liquid phase in flowing nitrogen. The α-Si3N4 micro-morphology could be effectively changed by adjusting the type of catalyst in the initial reaction mixtures. Fe, Co, and Ni promoted the formation of α-Si3N4 at 1250 °C and controlled the morphology of the α-Si3N4 particles. The hexagonal flakes of α-Si3N4 with a better defined morphology were obtained using Ni as the catalyst, compared to that obtained from the other two catalysts.
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