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AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application

Yichen Liu1, Lihao Wang1, Yongquan Su1,2

  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

Micromachines
|September 23, 2022
PubMed

Keywords:
AlScNLiDARLissajous scanningMEMS mirrormechanical couplingpiezoelectric

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