On-Chip Monolithic Integrated Multimode Carbon Nanotube Sensor for a Gas Chromatography Detector

Carbon nanotube (CNT)-based chemiresistors are promising gas detectors for gas chromatography (GC) due to their intrinsic nanoscale porosity and excellent electrical conductivity. However, fabrication reproducibility, long desorption time, limited sensitivity, and low dynamic range limit their usage in real applications. This paper reports a novel on-chip monolithic integrated multimode CNT sensor, where a micro-electro-mechanical system-based bulk acoustic wave (BAW) resonator is embedded underneath a CNT chemiresistor. The device fabrication repeatability was improved by on-site monitoring of CNT deposition using BAW. We found that the acoustic stimulation can accelerate the gas desorption rate from the CNT surface, which solves the slow desorption issue. Due to the different sensing mechanisms, the multimode CNT sensor provides complementary responses to targets with improved sensitivity and dynamic range compared to a single mode detector. A prototype of a chromatographic system using the multimode CNT sensor was prepared by dedicated design of the connection between the device and the separation column. Such a GC system is used for the quantitative identification of a gas mixture at different GC conditions, which proves the feasibility of the multimode CNT detector for chromatographic analysis. The as-developed CMOS compatible multimode CNT sensor offers high sensing performance, miniaturized size, and low power consumption, which are critical for developing portable GC.