High-Order Harmonic Film Bulk Acoustic Resonator Based on a Polymer Reflector

A film bulk acoustic resonator (FBAR), based on a polymer air cavity, is presented. The polymer reflective layer on the polymer air cavity can serve both as the reflective layer and the function layer for inducing the high-order mode resonance. With the aluminum nitride as the piezoelectric layer, the resonance frequency of the FBAR can reach 6.360 GHz, based on the finite element method. The product of the corresponding frequency and the quality factor, f × Q is more than 2 × 10¹³. This design model provides a good solution for the high-frequency filters and high-sensitivity sensor designs.