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Self-calibration interferometric stitching test method for cylindrical surfaces.

Hao Hu, Zizhou Sun, Shuai Xue

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    Summary
    This summary is machine-generated.

    A novel self-calibration interferometric stitching method accurately measures cylindrical surfaces. This technique overcomes limitations of traditional methods, enabling precise surface figure assessment for critical applications like gyroscopes and laser systems.

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    Area of Science:

    • Optical metrology
    • Precision engineering
    • Surface metrology

    Background:

    • Cylindrical surfaces in gyroscopes, machine tools, and laser systems demand high surface figure accuracy (near 0.1 µm).
    • Existing 1-D profile cylindricity instruments are inadequate for deterministic figuring.
    • Conventional interferometric stitching tests for cylindrical surfaces suffer from accumulated system errors, especially for large apertures requiring numerous subapertures.

    Purpose of the Study:

    • To propose a self-calibration interferometric stitching method for cylindrical surfaces.
    • To address the limitations of existing measurement techniques for high-accuracy cylindrical components.
    • To enable deterministic figuring by providing comprehensive surface figure data.

    Main Methods:

    • Theoretical analysis of the mathematical model for cylindrical surface figure and self-calibration completeness conditions.
    • Investigation into the impact of shear/stitching motion errors and subaperture lattice on test outcomes.
    • Development of a self-calibration interferometric stitching algorithm designed to recover all system error components.

    Main Results:

    • The proposed method theoretically recovers all necessary system error components for cylindrical surface testing.
    • Analysis identified the effects of motion errors and subaperture arrangement on measurement accuracy.
    • Simulations and experimental tests on a shaft demonstrated the feasibility and effectiveness of the self-calibration method.

    Conclusions:

    • The self-calibration interferometric stitching method offers a viable solution for high-accuracy cylindrical surface metrology.
    • This technique overcomes the system error accumulation issues of traditional stitching interferometry.
    • The validated method supports precise manufacturing and quality control for critical cylindrical components.