Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor

Lang-Xi Ou1, Meng-Yang Liu1, Li-Yuan Zhu1

  • 1State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics &Systems, School of Microelectronics, Fudan University, Shanghai, 200433, People's Republic of China.

Nano-Micro Letters
|October 21, 2022
PubMed
Summary

Flexible room-temperature gas sensors using metal oxide semiconductors (MOS) offer a path to lower power consumption and simplified designs for portable devices. This review explores advancements in MOS-based flexible room-temperature sensors, including material modifications and light-enhanced performance.