NiB-CrC Coatings Prepared by Magnetron Sputtering Using Composite Ceramic NiCr-BC Target Produced by Detonation Spray...

Area of Science:

• Materials Science
• Surface Engineering
• Nanotechnology

Background:

• Magnetron sputtering is a key technique for thin film deposition.
• Developing advanced composite targets is crucial for improving coating properties.
• Detonation spraying offers a novel method for fabricating complex material structures.

Purpose of the Study:

• To fabricate a novel metal-ceramic composite target for magnetron sputtering.
• To investigate the structural and mechanical properties of the deposited coatings.
• To explore the potential of detonation spraying for creating advanced sputtering targets.

Main Methods:

• Fabrication of a NiCr/B4C composite target using robotic detonation spraying.
• Characterization of the target coating using scanning electron microscopy (SEM).
• Deposition and analysis of NiB-Cr7C3 coatings using magnetron sputtering and transmission electron microscopy (TEM).

Main Results:

• A dense, uniformly distributed NiCr/B4C composite target was successfully fabricated.
• Uniform annular erosion patterns were observed on the target surface after sputtering.
• Dense NiB-Cr7C3 coatings with quasi-amorphous, nanocrystalline multi-phase structures were deposited.
• The NiB-Cr7C3 coatings exhibited a microhardness of 10 GPa and adhesion fracture load exceeding 16 N.

Conclusions:

• Detonation spraying is a viable method for producing composite sputtering targets.
• The developed NiCr/B4C target enables the deposition of high-performance NiB-Cr7C3 coatings.
• This technology opens new avenues for creating advanced composite cathodes for magnetron sputtering.