Omnidirectional, thin metasurface exhibiting selective absorption for un-polarized broadband incidence

Thin devices with large areas have strong and omnidirectional absorption over a wide bandwidth and are in demand for applications such as energy harvesting, structural color, and vehicle LiDAR (laser detection and ranging). Despite persistent efforts in the design and fabrication of such devices, the simultaneous realization of all these desired properties remains a challenge. In this study, a 190-nm-thick metasurface with an area of 3 cm2, incorporating dielectric cylinder arrays, a chromium layer, a silicon nitride (SiNx) layer, and an aluminum layer is theoretically and experimentally demonstrated. The developed device achieves an average absorptivity of ∼99% (97% in the experiment) in the entire visible spectrum 400-700 nm. Moreover, it exhibits strong absorption over a wide range of incident angles (∼91% and 90% at 60° in the calculation and experiment, respectively). Importantly, the feasibility of applying the developed metasurface absorber to solar thermophotovoltaics and vehicle LiDAR (laser detection and ranging) has been explored. Moreover, the photoresist can be replaced by other glues and easily scaled up to a large area using the roll-to-roll nanoimprinting process. With the excellent spectral properties and performance, this device is promising for large-area applications.