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A Piezoelectric MEMS Microgripper for Arbitrary XY Trajectory
1Depatment of Industrial, Electronic and Mechanical Engineering, Roma Tre University, Via Vito Volterra 62, 00146 Roma, Italy.
Micromachines
|November 11, 2022
Summary
This study introduces a piezoelectric microgripper capable of achieving any desired 2D trajectory for precise micro-object manipulation. The novel design utilizes a deformable structure actuated by piezoelectric plates, verified through finite element analysis.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Robotics and Control
- Materials Science
Background:
- Precise manipulation of micro-scale objects is crucial for applications in medicine and manufacturing.
- Existing microgrippers often have limitations in trajectory control and flexibility.
- Piezoelectric actuation offers high precision and responsiveness for micro-scale movements.
Purpose of the Study:
- To propose and validate a novel piezoelectric microgripper design.
- To achieve arbitrary 2D trajectory control for micro-object manipulation.
- To investigate the influence of key design parameters on trajectory generation.
Main Methods:
- Design of a microgripper structure with 16 straight beams and 12 C-structures.
- Utilizing piezoelectric plates for actuation via electrical voltage.
- Finite Element Method (FEM) simulations using COMSOL software for verification.
- Examination of common trajectories for medical applications and micropositioning.
Main Results:
- The proposed piezoelectric microgripper successfully generated arbitrary, parametrizable 2D trajectories.
- The deformability of the integrated beam and C-structure enabled precise path control.
- FEM simulations confirmed the model's capability to replicate desired specimen paths.
- Parametric studies identified key factors influencing trajectory accuracy and repeatability.
Conclusions:
- The developed piezoelectric microgripper offers versatile and precise 2D trajectory control.
- This technology holds significant potential for advanced micro-manipulation tasks.
- Further research can optimize the design for specific micro-assembly and medical procedures.
