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A New Approach for Sensitive Characterization of Semiconductor Laser Beams Using Metal-Semiconductor Thermocouples.
Anna Katarzyna Piotrowska1, Adam Łaszcz1, Michał Zaborowski1
1Łukasiewicz Research Network-Institute of Microelectronics and Photonics, Al. Lotników 32/46, 02-668 Warsaw, Poland.
Sensors (Basel, Switzerland)
|December 11, 2022
Summary
Novel thermocouple detectors were fabricated using MEMS and FIB milling for semiconductor laser beam analysis. These detectors successfully mapped near-infrared laser intensity distributions.
Area of Science:
- Optoelectronics
- Nanotechnology
- Materials Science
Background:
- Semiconductor infrared (IR) lasers require precise beam characterization for performance optimization.
- Traditional beam profiling methods may lack sensitivity or resolution for certain applications.
- Thermocouple detectors offer a potential solution due to their sensitivity to temperature variations induced by IR radiation.
Purpose of the Study:
- To design and fabricate novel thermocouple-based detectors for semiconductor IR laser beam investigations.
- To experimentally validate the sensitivity of these detectors to near-infrared (NIR) radiation.
- To demonstrate the capability of the detectors in reconstructing laser beam intensity profiles.
Main Methods:
- Design and fabrication of linear arrays of nano- and microscale thermocouples using Si-compatible MEMS processes.
- Enhancement of thermocouple fabrication with focused ion beam (FIB) milling for precise junction definition.
- Experimental testing of detector sensitivity to NIR radiation (λ = 976 nm) and measurement of output voltage as a function of position.
Main Results:
- Successful fabrication of thermocouple detectors demonstrating sensitivity to IR radiation.
- Measurement of output voltage correlated with detector position, enabling beam profiling.
- Reconstruction of a Gaussian-like intensity distribution of the incident laser beam.
Conclusions:
- The developed thermocouple detectors are effective for characterizing semiconductor IR laser beams.
- The Seebeck effect-based detectors provide a viable method for non-destructive beam intensity mapping.
- This technology offers a promising approach for laser diagnostics in optoelectronic applications.
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