Related Experiment Video
Updated: Aug 17, 2025
16:11
Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
9.4K
Ultracompact single-layer optical MEMS accelerometer based on evanescent coupling through silicon nanowaveguides.
Chenguang Xin1,2, Zhongyao Zhang3, Xuhu Wang3
1School of Instrument and Electronics, North University of China, Taiyuan, 030051, China. xincg@nuc.edu.cn.
Scientific Reports
|December 15, 2022
Summary
A new optical MEMS accelerometer uses silicon nanowaveguides to detect acceleration by measuring light transmission changes. This compact, assembly-free design shows high sensitivity for integrated photonic circuits.
Area of Science:
- Photonics and Microelectromechanical Systems (MEMS)
Background:
- Traditional accelerometers face limitations in miniaturization and integration.
- Optical sensing offers high sensitivity and immunity to electromagnetic interference.
Purpose of the Study:
- To propose and simulate a novel optical MEMS accelerometer.
- To leverage evanescent coupling in silicon nanowaveguides for acceleration sensing.
Main Methods:
- Design of an optical MEMS accelerometer based on evanescent coupling between parallel silicon nanowaveguides.
- Simulation of acceleration-induced changes in coupling length and efficiency.
- Measurement of transmitted light intensity to determine acceleration.
Main Results:
- Achieved optical displacement sensing sensitivity of 32.83% per micrometer.
- Demonstrated a measurement range of up to 1.68 g.
- The accelerometer design exhibits high compactness and requires no assembly.
Conclusions:
- The proposed optical MEMS accelerometer effectively measures acceleration via changes in evanescent coupling.
- The design's compactness and integration potential are significant.
- This technology holds promise for applications in integrated photonic circuits.
