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    A new focusing long trace profiler (FLTP) enhances surface metrology for synchrotron mirrors. This system uses a focused beam to improve spatial frequency bandwidth, enabling precise measurements of mirror surfaces.

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    Area of Science:

    • Optics and Metrology
    • Surface Science
    • Synchrotron Radiation Technology

    Background:

    • Deflectometric slope profiling is crucial for synchrotron beamline mirror metrology.
    • Current limitations in spatial frequency bandwidth restrict measurement capabilities.
    • Reducing beam spot size is key to enhancing profiler performance.

    Purpose of the Study:

    • Introduce a novel Focusing Long Trace Profiler (FLTP) system.
    • Improve the upper spatial frequency bandwidth limits of deflectometric profilers.
    • Demonstrate enhanced metrology for synchrotron mirror surfaces.

    Main Methods:

    • Development of a new optical head utilizing a focused beam.
    • Implementation of the FLTP system for scanning mirror samples.
    • Numerical simulations and experimental characterization of the system's performance.

    Main Results:

    • Achieved a spatial resolution of approximately 0.05 mm in simulations.
    • Demonstrated high angular accuracy of sub-50 nanoradian (nrad) root-mean-square (rms).
    • Confirmed measurement accuracy is unaffected by sample defocusing and showed advantage in curved mirror metrology.

    Conclusions:

    • The FLTP system significantly enhances spatial frequency bandwidth for surface metrology.
    • The focused beam approach offers superior resolution and accuracy for mirror surface analysis.
    • FLTP is advantageous for characterizing highly curved mirrors in synchrotron applications.