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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Phase errors and statistical analysis of silicon-nitride arrayed waveguide gratings.

Qi Han, Daniel Robin, Antoine Gervais

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    |December 16, 2022
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    This summary is machine-generated.

    Fabrication variations introduce phase errors in optical waveguides, impacting arrayed waveguide gratings (AWGs). These errors significantly increase insertion loss and crosstalk, degrading AWG performance.

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    Area of Science:

    • Photonics and Optical Engineering
    • Materials Science
    • Statistical Analysis

    Background:

    • Arrayed waveguide gratings (AWGs) are crucial for wavelength division multiplexing.
    • Fabrication variations in optical waveguides can lead to phase errors, affecting device performance.
    • Quantifying the impact of these phase errors is essential for optimizing AWG design and manufacturing.

    Purpose of the Study:

    • To statistically analyze the impact of phase errors in optical waveguides on AWG performance metrics.
    • To parameterize key figures of merit (insertion loss, crosstalk, non-uniformity) as a function of waveguide coherence length.
    • To investigate the effect of phase errors on AWGs with different channel spacings (200 GHz and 100 GHz).

    Main Methods:

    • Characterization of waveguide coherence length using Mach-Zehnder interferometers.
    • Measurement of die-level coherence length for silicon nitride (SiN) waveguides.
    • Monte Carlo simulations employing a semi-analytical model to assess performance degradation.
    • Statistical analysis of insertion loss, crosstalk, and non-uniformity.

    Main Results:

    • A die-level coherence length of 23.7 mm was measured for sub-micrometer-thick SiN waveguides.
    • Waveguide phase errors were found to cause significant excess insertion loss and crosstalk in AWGs.
    • Increased non-uniformity across channels was observed due to accumulated phase errors.
    • The impact of phase errors was studied for both 200 GHz and 100 GHz channel spacing AWGs.

    Conclusions:

    • Phase errors in optical waveguides, stemming from fabrication variations, substantially degrade AWG performance.
    • Coherence length is a critical parameter for predicting and mitigating the effects of phase errors.
    • Accurate modeling and characterization are vital for fabricating high-performance AWGs with tight channel spacing.