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A rolled-up-based fabrication method of 3D helical microrobots
Zihan Wang1,2, Xueliang Mu1,3, Liyuan Tan1
1Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen, China.
Frontiers in Robotics and AI
|December 16, 2022
Summary
This study presents a low-cost, high-throughput method for fabricating helical microrobots. The new technique ensures consistent dimensions and comparable swimming properties for biomedical applications.
Area of Science:
- Materials Science
- Nanotechnology
- Biomedical Engineering
Background:
- Helical microrobots show promise for drug delivery and micromanipulation.
- Current fabrication methods are costly, slow, and lack repeatability for practical use.
Purpose of the Study:
- To develop a simple, low-cost, high-throughput manufacturing process for single nickel layer helical microrobots.
- To ensure consistent dimensions and controllable helical parameters.
- To validate the microrobots' performance for biomedical applications.
Main Methods:
- Fabrication using photolithography and electron-beam (e-beam) evaporation to create 2D parallelogram patterns.
- Sequential rolling into helical microstructures via photoresist sacrificial layer swelling.
- Characterization using scanning electron microscopy and mobility testing with feedback control.
Main Results:
- Successfully fabricated single nickel layer helical microrobots with consistent dimensions.
- Demonstrated control over helical parameters by adjusting 2D pattern geometry.
- Achieved swimming properties comparable to previously reported microrobots.
Conclusions:
- The developed fabrication method is simple, cost-effective, and high-throughput.
- This process enables the production of reliable helical microrobots for potential biomedical applications.
- The consistent dimensions and performance make these microrobots viable for practical use.
