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    Area of Science:

    • Optical Engineering
    • MEMS Technology
    • Inertial Sensing

    Background:

    • Fiber optic sensors offer advantages in harsh environments.
    • Fabry-Perot interferometers are sensitive optical transducers.
    • Miniaturized accelerometers are crucial for various applications.

    Purpose of the Study:

    • To present a novel fiber optic accelerometer.
    • To characterize its performance for vibration detection.
    • To demonstrate its potential in low-frequency applications.

    Main Methods:

    • Fabrication using silicon micromachining.
    • Design incorporating a center block mass and folded springs.
    • Performance evaluation through theoretical estimation, finite element simulation, and experimental testing.

    Main Results:

    • Achieved sensitivity exceeding 161 rad/g within a 1-63 Hz frequency range.
    • Demonstrated a low average noise level of 67.4 ng/Hz1/2.
    • Exhibited transverse crosstalk below 1.38%.

    Conclusions:

    • The developed fiber optic accelerometer shows excellent performance metrics.
    • Its design and capabilities are well-suited for low-frequency vibration detection.
    • This sensor represents a promising advancement in inertial sensing technology.