Related Experiment Video
Updated: Aug 14, 2025

09:54
Fabrication of Refractive-index-matched Devices for Biomedical Microfluidics
Published on: September 10, 2018
7.5K
Highly efficient thin-film 930 nm VCSEL on PDMS for biomedical applications
Ohdo Kwon1, Sunghyun Moon1, Yeojun Yun1
1Department of Electrical and Computer Engineering, Ajou University, Suwon, 16499, South Korea.
Scientific Reports
|January 11, 2023
Summary
Researchers developed biocompatible thin-film vertical-cavity surface-emitting lasers (VCSELs) on Polydimethylsiloxane (PDMS) for biomedical uses. This innovation enables advanced optical sensing, optogenetics, and phototherapy applications.
Area of Science:
- Optoelectronics
- Biomedical Engineering
- Materials Science
Background:
- Biocompatible optical sources are crucial for emerging biomedical applications like sensing, optogenetics, and phototherapy.
- Vertical-cavity surface-emitting lasers (VCSELs) are promising due to their low power, cost-effectiveness, and suitability for 2D arrays.
Purpose of the Study:
- To demonstrate biocompatible thin-film 930 nm VCSELs integrated onto a Polydimethylsiloxane (PDMS) carrier for biomedical applications.
- To leverage the biocompatibility and biostability of PDMS for enhanced optical device integration.
Main Methods:
- Utilized a double-transfer technique to integrate thin-film VCSELs onto a PDMS carrier while preserving p-on-n polarity.
- Employed surface modification-assisted bonding (SMB) with oxygen plasma and silane treatment for robust bonding.
Main Results:
- Successfully fabricated biocompatible thin-film 930 nm VCSELs on a PDMS carrier.
- Achieved a low threshold current of 1.08 mA and a maximum output power of 7.52 mW at 13.9 mA injection current.
Conclusions:
- The developed thin-film VCSELs on PDMS are well-suited for diverse biomedical applications.
- The integration technique ensures device stability and performance for optical sensing and therapeutic uses.

