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Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator

Yuanhang Qu1, Tiancheng Luo1, Zhiwei Wen1

  • 1The Institute of Technological Sciences, Wuhan University, Wuhan 430072, China.

Micromachines
|January 21, 2023
PubMed

Keywords:
FBARadjustable effective electromechanical coupling coefficientaluminum nitride

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