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Dynamic pressure surface deformation measurement based on a chromatic confocal sensor.
Applied Optics
|February 23, 2023
Summary
This study introduces a novel method for real-time pressure deformation measurement in sealed cavities. The technique combines sensors to achieve micrometer-level surface deformation monitoring with high accuracy.
Area of Science:
- Metrology
- Mechanical Engineering
- Sensor Technology
Background:
- Accurate measurement of pressure-induced deformations is crucial for sealed systems.
- Existing methods may lack real-time capabilities or precision for micrometer-level changes.
Purpose of the Study:
- To develop and validate a high-precision method for real-time measurement of surface deformation in sealed cavities.
- To integrate chromatic confocal displacement and pressure sensors for dynamic strain acquisition.
Main Methods:
- Finite element analysis simulation of a pressurized cylindrical cavity.
- Experimental setup combining a chromatic confocal displacement sensor and a pressure sensor.
- Utilizing the Voigt fitting algorithm to minimize sensor errors and analyze spectral data.
Main Results:
- Experimental deformation measurements showed a low relative error of 0.083% compared to simulations.
- The method achieved an uncertainty error of 1.495 µm in pressure deformation measurement.
- The system demonstrated robustness against external disturbances.
Conclusions:
- The proposed sensor combination enables robust, real-time, micrometer-level surface deformation monitoring.
- This method is suitable for high-precision inspection applications in various industries.
- The integration of sensors provides dynamic online strain measurements considering material and environmental factors.
