Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM

Area of Science:

• Materials Science
• Analytical Chemistry
• Nanotechnology

Background:

• Atom probe tomography (APT) is a key technique for microstructural analysis, relying on laser-assisted field evaporation and focused ion beam (FIB) for tip preparation.
• Mass resolution in APT is sensitive to laser conditions, material thermal conductivity, and specimen tip shape.
• Reproducibility in APT data is contingent upon maintaining a consistent tip shape, which dictates the analytical volume.

Purpose of the Study:

• To develop an automated method for fabricating specimen tips with precise shapes for APT analysis.
• To investigate the influence of intentionally altered tip shapes on APT data quality and reproducibility.
• To reduce operator dependency in the site-specific tip preparation process using FIB-SEM.

Main Methods:

• Development of a script-controlled focused ion beam-scanning electron microscopy (FIB-SEM) system for automated tip fabrication.
• Intentional manipulation of specimen tip shapes using the developed automated method.
• Analysis of the impact of varied tip shapes on atom probe tomography data, including mass resolution and reproducibility.

Main Results:

• Successful implementation of a script-controlled FIB-SEM system for reproducible, automated tip fabrication.
• Demonstration that intentionally modified tip shapes significantly affect APT mass resolution and data quality.
• Quantification of the relationship between tip geometry and analytical volume in APT.

Conclusions:

• The developed automated tip fabrication method enhances the reproducibility of APT analyses by controlling tip shape.
• Understanding and controlling tip shape is crucial for optimizing APT performance and data interpretation.
• This advancement reduces reliance on operator skill, making advanced microstructural analysis more accessible.