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Updated: Aug 8, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Miniaturized Quad-Band Filter Design Using Substrate Integrated Coaxial Cavity.
Chung-I G Hsu1, Wanchu Hong2, Mingchih Chen3
1Department of Electrical Engineering, College of Engineering, National Yunlin University of Science and Technology, Yunlin 64002, Taiwan.
A new miniaturized quad-band filter (QBF) uses substrate-integrated coaxial cavities (SICCs) for significant size reduction. This innovative design achieves lower resonant frequencies, enabling compact electronic devices.
Area of Science:
- Electrical Engineering
- Electromagnetics
- Microwave Engineering
Background:
- Miniaturization is crucial for modern electronic devices.
- Traditional filters often occupy significant space.
- Substrate-Integrated Waveguide (SIW) cavities offer integration but can be bulky.
Purpose of the Study:
- To propose and demonstrate a miniaturized quad-band filter (QBF).
- To achieve significant size reduction compared to conventional designs.
- To explore the use of substrate-integrated coaxial cavities (SICCs) for multi-band filtering.
Main Methods:
- Design of a novel SICC structure with vertically stacked substrates.
- Segmentation of an embedded circular patch into four pieces.
- Utilizing blind vias to short the patch segments to the bottom wall.
- Fabrication and experimental measurement of a prototype QBF.
Main Results:
- The SICC structure demonstrated four independently controlled resonances.
- Achieved resonant frequencies were significantly lower than conventional SIW cavities.
- The designed filter exhibited substantial size reduction.
- Experimental measurements showed good agreement with simulation results.
Conclusions:
- The proposed SICC-based QBF effectively achieves miniaturization.
- This design offers a viable solution for compact multi-band filtering applications.
- The SICC structure provides a promising platform for future filter designs.
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