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Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System.
Xiang Cheng1,2,3, Shun Xu1,2,3, Yan Liu4
1School of Aerospace Engineering, Xiamen University, Xiamen 361005, China.
Micromachines
|March 29, 2023
Summary
This study introduces a novel optoelectronic sensor to correct phase errors in micro-electro-mechanical system (MEMS) scanning micromirrors. The sensor significantly improves the accuracy of active structured light systems by reducing phase errors to 2.5%.
Area of Science:
- Optoelectronics
- Micro-electro-mechanical Systems (MEMS)
Background:
- MEMS scanning micromirrors are crucial for active structured light systems.
- Initial phase errors from micromirrors degrade system accuracy.
Purpose of the Study:
- To develop an optoelectronic integrated sensor for correcting micromirror phase errors.
- To enhance the accuracy of active structured light systems.
Main Methods:
- Fabrication of an optoelectronic sensor chip using a 180 nm CMOS process.
- Integration of a large-area photodetector (PD) with a receiving circuit (post amplifier, operational amplifier, bandgap reference, reference current circuit).
Main Results:
- The sensor exhibits high irradiance responsivity (100 mV/(μW/cm²) at 5 V) and linearity.
- Achieved a -3 dB bandwidth of 2 kHz and minimal detectable light power of 19.4 nW.
- Effectively reduced micromirror phase error to 2.5%.
Conclusions:
- The developed optoelectronic sensor is suitable for active structured light systems requiring high accuracy.
- The sensor's performance metrics satisfy the demands of various applications.
- This technology offers a viable solution for mitigating phase errors in MEMS-based systems.
