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Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope.

Shihe Wang1, Jianlin Chen1,2, Takashiro Tsukamoto1

  • 1Department of Robotics, Tohoku University, Sendai 9808579, Japan.

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|March 30, 2023
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Summary
This summary is machine-generated.

This study introduces a novel multi-ring disk resonator using elliptic spokes to correct for single crystal silicon

Keywords:
(100) single crystal silicondisk resonatorelliptic spokefrequency mismatchmode matched resonatormulti-ring structure

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Area of Science:

  • Micro-electromechanical systems (MEMS)
  • Resonator technology
  • Silicon photonics

Background:

  • Single crystal silicon exhibits anisotropic elastic properties, affecting resonator performance.
  • Conventional disk resonators suffer from significant frequency mismatches due to this anisotropy.
  • Compensating for material anisotropy is crucial for high-precision resonator applications.

Purpose of the Study:

  • To design and demonstrate a multi-ring disk resonator capable of compensating for the aniso-elasticity of (100) single crystal silicon.
  • To investigate the use of elliptic spokes for controlling structural coupling and mode degeneration.
  • To achieve mode-matched resonators with significantly reduced frequency mismatch.

Main Methods:

  • Utilizing a multi-ring disk resonator architecture with elliptic spokes instead of traditional straight spokes.
  • Controlling the structural coupling between ring segments through the design of elliptic spokes.
  • Optimizing the aspect ratio of elliptic spokes to achieve mode degeneration.
  • Validating the design through numerical simulations and experimental measurements.

Main Results:

  • Demonstrated that elliptic spokes effectively control structural coupling and enable mode degeneration.
  • Achieved mode-matched resonators when the elliptic spoke aspect ratio was optimized to 25/27.
  • Experimentally verified a frequency mismatch as low as 1330 ± 900 ppm.
  • Showcased a significant reduction in frequency mismatch compared to conventional disk resonators (30,000 ppm).

Conclusions:

  • The proposed multi-ring disk resonator with elliptic spokes is an effective solution for compensating silicon aniso-elasticity.
  • This design significantly improves frequency stability and precision in silicon resonators.
  • The findings pave the way for more accurate and reliable micro-resonator devices.