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A spectrally selective visible microbolometer based on planar subwavelength thin films
Qianqian Xu1,2, Ziji Zhou1,2, Chong Tan1,2
1State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Shanghai 200083 China.
Nanoscale Advances
|March 31, 2023
Summary
We developed a new, low-cost visible microbolometer using metal-insulator-metal films. This compact device achieves spectral selectivity via resonant absorption, offering a significant performance improvement over traditional designs.
Area of Science:
- Optoelectronics
- Nanotechnology
- Materials Science
Background:
- Traditional microbolometers often require complex filter structures for spectral selectivity.
- There is a need for compact, cost-effective microbolometer solutions for visible light detection.
Purpose of the Study:
- To experimentally demonstrate a novel, compact, and low-cost visible microbolometer.
- To utilize metal-insulator-metal (MIM) planar subwavelength thin films for resonant absorption-based spectral selectivity.
Main Methods:
- Fabrication of a microbolometer device using MIM planar subwavelength thin films.
- Experimental characterization of the device's spectral response and responsivity in the visible range.
- Comparison with a control device (bare gold bolometer) to quantify performance enhancement.
Main Results:
- The proof-of-principle microbolometer demonstrated spectrally selective properties in the visible frequency range.
- A responsivity of approximately 10 mV/W was achieved at room temperature at 638 nm resonant wavelength.
- The responsivity was about ten times higher than that of the bare gold control device.
Conclusions:
- The proposed MIM microbolometer offers a viable solution for compact and inexpensive visible light detectors.
- Resonant absorption in MIM thin films provides spectral selectivity without additional filters.
- The technology shows promise for large-format fabrication and cost-efficient detector development.

