Large Range Atomic Force Microscopy with High Aspect Ratio Micropipette Probe for Deep Trench Imaging

Area of Science:

• Materials Science
• Nanotechnology
• Instrumentation

Background:

• Atomic Force Microscopy (AFM) is crucial for high-fidelity topographic characterization.
• Standard AFM systems are limited to relatively flat samples due to scanner range and tip size.
• Characterizing samples with deep trenches (>1 µm) remains a significant challenge.

Purpose of the Study:

• To overcome the limitations of conventional AFM for large-range measurements.
• To develop a novel repairable high aspect ratio probe (HARP) for enhanced AFM capabilities.
• To enable 3D characterization of samples with deep trenches (>10 µm).

Main Methods:

• Fabrication of a novel repairable high aspect ratio probe (HARP) using a cost-efficient bench-top process.
• Development and implementation of a nested-proportional-integral-derivative (nested-PID) AFM system.
• Testing the HARP system on polymer trenches and 50-µm-step samples.

Main Results:

• The HARP system demonstrated superior image fidelity compared to standard silicon tips on polymer trenches.
• The nested-PID system facilitated 3D characterization of samples with 50-µm steps.
• The developed technique allows for imaging of samples with deep trenches, exceeding 10 µm height.

Conclusions:

• The proposed bench-top technique effectively fabricates low-cost, simple HAR AFM probes.
• The HARP and nested-PID system significantly enhance AFM capabilities for deep trench imaging.
• This advancement expands the application scope of AFM in industry and academia.