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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
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Ultrahigh-Q lithium niobate microring resonator with multimode waveguide.
Optics Letters
|May 1, 2023
Summary
Researchers developed a new lithium niobate (LN) microresonator with a high quality factor (Q) and significantly reduced propagation loss. This advancement enables ultra-narrow bandwidth microwave photonic filters and benefits applications in quantum photonics and frequency conversion.
Area of Science:
- Photonics
- Materials Science
- Optical Engineering
Background:
- Lithium niobate (LN) microresonators are crucial for photonic applications but suffer from high propagation loss due to etching difficulties.
- Achieving high quality factor (Q) microresonators in LN requires sophisticated fabrication processes.
Purpose of the Study:
- To fabricate a multimode LN microring resonator with significantly reduced propagation loss and high Q-factor.
- To demonstrate the effectiveness of Euler bends in suppressing higher-order modes.
- To implement a bandpass microwave photonic filter using the fabricated microresonator.
Main Methods:
- Fabrication of a multimode microring resonator using advanced etching techniques.
- Utilizing Euler bends to suppress higher-order mode excitation.
- Characterization of resonator performance, including Q-factor and free spectral range (FSR).
- Implementation and testing of a bandpass microwave photonic filter.
Main Results:
- Achieved an intrinsic Q-factor of 6 × 106.
- Demonstrated a propagation loss 50 times lower than single-mode LN microring resonators.
- Successfully suppressed higher-order modes using Euler bends.
- Implemented a microwave photonic filter with a 47.5 MHz bandwidth and 2-26.5 GHz tuning range.
Conclusions:
- The developed multimode LN microring resonator offers a significant reduction in propagation loss.
- Euler bends are effective in controlling mode excitation in LN resonators.
- This work facilitates improved performance in ultrahigh-Q LN microresonator applications like frequency combs and quantum photonics.

