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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Multiple wavelength digital holography for freeform shape measurement and lens alignment
Applied Optics
|May 3, 2023
Abstract:
This paper introduces a technique for freeform optical surface measurements using digital holography with multiple discrete wavelengths or wavelength scans. This experimental arrangement, i.e., a Mach-Zehnder holographic profiler, is optimized to achieve maximal theoretical precision and is capable of measuring freeform diffuse surfaces. Moreover, the approach can also be used for diagnostics of precise placement of elements within optical systems.

