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Demonstration of high-accuracy 3D imaging using a Si optical phased array with a tunable radiator
Optics Express
|May 9, 2023
Summary
This study introduces a silicon optical phased array (OPA) LiDAR for high-accuracy 3D imaging. The system achieves precise distance measurement with a tunable radiator, enabling robust 3D imaging applications.
Area of Science:
- Photonics and Optical Engineering
- Solid-State LiDAR Technology
- 3D Imaging Systems
Background:
- Precise 3D imaging is crucial for solid-state light detection and ranging (LiDAR).
- Silicon (Si) optical phased array (OPA)-based LiDAR offers advantages like high scanning speed, low power, and compactness.
- Existing Si OPA techniques for longitudinal scanning have limitations.
Purpose of the Study:
- To demonstrate high-accuracy 3D imaging using a Si OPA with a tunable radiator.
- To develop an optical pulse modulator for precise distance measurement.
- To overcome limitations of current Si OPA longitudinal scanning methods.
Main Methods:
- Implemented a Si OPA comprising an input grating coupler, multimode interferometers, electro-optic p-i-n phase shifters, and thermo-optic n-i-n tunable radiators.
- Adapted a time-of-flight approach for distance measurement.
- Developed an optical pulse modulator for enhanced ranging accuracy.
Main Results:
- Achieved a ranging accuracy of less than 2 cm.
- Demonstrated a wide beam steering range: 45° transversal (0.7° divergence) and 10° longitudinal (0.6° divergence).
- Successfully imaged a character toy model in 3D with a 2 cm range resolution.
Conclusions:
- The developed Si OPA with a tunable radiator enables high-accuracy 3D imaging.
- The system's performance in beam steering and range resolution is significant.
- Further component improvements promise even more accurate and longer-distance 3D imaging.

