A Biosensing Platform Based on Metamaterials BioNEMS for Lab-on-Chip Systems

An optical nanoelectromechanical platform relied on a SRR metamaterial system is presented in this paper as a label-free biosensor. This structure includes a flexible BioNEMS (Bio-Nano-Electro-Mechanical Systems) transducer and a proposed SRR metamaterials for detection of biological changes. Metamaterial cells consist of two parts which are coupled with an air gap distance. A functionalized BioNEMS beam supports one part of the proposed metamaterial cells. When patient samples including target analytes is exposed to the NEMS beam surface, the specific bio-interactions are happened and the energy (surface stress type) is released on the surface. This energy, which is induced only to the one side of the movable beam, causes a differential surface stress and thus displaces the nanomechanical beam. As a result, the air distance between two separated cells of the metamaterial unit is changed. This leads to varying the cell coupling effect which excites plasmon modes in a different wavelength. Therefore, biological quantities can be measured by detecting the resonance wavelength changes. Moreover, analyzing the device by various approaches results its functional characteristics as follows: detection sensitivity of 4251 nm/RIU, figure of merit (FOM) of 500.1 RIU ^-1 , mechanical sensitivity of [Formula: see text]/Nm ^-1 and resonant frequency of 17.1 kHz. Consequently, this mechanism is important for label-free biosensing due to its high potential for sensitive and quantitative detection of target analytes which leads to accurate diagnosis of diseases or identification of drugs.