Machine learning interatomic potential for silicon-nitride (Si3N4) by active learning

Diego Milardovich1, Christoph Wilhelmer1,2, Dominic Waldhoer1

  • 1Institute for Microelectronics, Technische Universität Wien, Gußhausstraße 27-29, 1040 Vienna, Austria.

Summary

Researchers developed a machine learning interatomic potential for silicon nitride (Si3N4), improving atomistic simulations. This new potential accurately models amorphous silicon nitride, enabling faster and more reliable material studies.

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