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Related Experiment Video

Updated: Jul 30, 2025

Thermal Measurement Techniques in Analytical Microfluidic Devices
08:29

Thermal Measurement Techniques in Analytical Microfluidic Devices

Published on: June 3, 2015

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Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics.

Vitaly V Ryzhkov1, Vladimir V Echeistov1,2, Aleksandr V Zverev1

  • 1FMN Laboratory, Bauman Moscow State Technical University, Moscow, 105005, Russia. irodionov@bmstu.ru.

Lab on a Chip
|May 18, 2023
PubMed
Summary

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This summary is machine-generated.

A novel membrane-free microfluidic thermal flow sensor (MTFS) is integrated directly into silicon-glass lab-on-a-chip devices. This sensor offers precise, real-time liquid flow control for portable analytical systems, overcoming limitations of external flow meters.

Area of Science:

  • Microfluidics
  • Sensor Technology
  • Analytical Instrumentation

Background:

  • Lab-on-a-chip (LOC) systems require precise control of ultralow liquid reagent flows for multistep reactions.
  • Existing flow meters often introduce dead volume and are incompatible with microfluidic chip fabrication.
  • A need exists for integrated, robust flow sensors for advanced portable analytical devices.

Purpose of the Study:

  • To develop and characterize a novel membrane-free microfluidic thermal flow sensor (MTFS) for seamless integration into LOC devices.
  • To propose design rules for optimizing MTFS sensitivity and measurement range.
  • To demonstrate the compatibility of the MTFS with corrosive liquids and its long-term stability.

Main Methods:

  • Fabrication of a membrane-free MTFS using a 4'' wafer silicon-glass process, integrating thin-film thermo-resistive elements isolated from microchannels.

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  • Development of design rules for maximizing sensor performance.
  • Implementation of an automated calibration method for the thermo-resistive elements.
  • Experimental validation against a Coriolis flow sensor over extended periods.

    • Main Results:

    • Successful integration of the MTFS into silicon-glass microfluidic chips.
    • Demonstrated compatibility with corrosive liquids, crucial for biological applications.
    • Achieved a relative flow error of less than 5% for flow rates between 2-30 μL min⁻¹.
    • Exhibited a sub-second time response and stability over hundreds of hours of testing.

    Conclusions:

    • The developed membrane-free MTFS is a viable, integrated solution for precise liquid flow control in LOC devices.
    • This technology enhances the capabilities of portable analytical systems, particularly for applications involving corrosive reagents.
    • The MTFS offers a robust, accurate, and fast alternative to conventional external flow meters in microfluidic applications.